Samco, Inc.

Samco, Inc. is a machining company focused on semiconductor equipment. It manufactures deposition, etching, and surface treatment systems for R&D and production, including atomic layer deposition (ALD), anode/cathode PECVD, atomic layer etching (ALE), inductively coupled plasma (ICP) etching, Si deep reactive ion etching (DRIE), reactive ion etching (RIE), and xenon difluoride (XeF2) etching. The company also provides surface treatment processes such as Aqua Plasma®, plasma cleaning, and UV ozone cleaning. Its featured manufacturing systems include RIE plasma etching systems (RIE-10NR), ICP-RIE plasma etching systems (RIE-400iP), and PECVD deposition systems (PD-220NL). Samco’s core expertise is thin-film technology, supporting semiconductor device and electronic component manufacturing. The company was established in 1979 in Kyoto.

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